نویسندگان
1 انشگاه شاهرود
2 دانشگاه علوم و فنون دریایی خرمشهر
چکیده
در این مقاله ، یک مدل غیرخطی میکروتیر دو سر گیردار تحت اثر بار الکترواستا ت یک، اثر ات کشش درون صفح ه ای و میرایی ترموالاستیک در نظر گرفته شده است. فرکانس ارتعاش آزاد با استفاده از گسسته سازی براساس روش تربیع دیفرانسیلی به دست آمده، که به دلیل اتلاف انرژی ناشی از میرایی ترموالاستیک، این فرکانس کمیتی مختلط است. با تفکیک مقادیر حقیقی و موهومی فرکانس می توان ضریب کیفیت میرایی ترموالاستیک را محاسبه کرد. اثرات کشش درون صفحه ای و میرایی ترموالاستیک در مقایسه با نتایج مقالات مرجع صحه گذاری شدند. تغییرات میرایی ترموالاستیک برحسب مدول الاستیسیته، ضریب انبساط گرمایی و متغیرهای هندسی شامل ضخامت، طول و فاصله خازنی بررسی شده و نتایج مدلهای خطی و غیرخطی در ولتاژهای بالا مقایسه شده اند. همچنین نشان داده شده است که در ولتاژهای بالا مدل خطی در محاسبه میرایی ترموالاستیک خطای زیادی دارد و در این ولتاژها باید از مدل غیرخطی استفاده شود .
کلیدواژه‌ها
عنوان مقاله [English]
On the Effect of Thermoelastic Damping in Nonlinear Micro Electro Mechanical Resonators using Differential Quadrature Method
نویسندگان [English]
- A. Karami Mohammadi 1
- N. AleAli 2
چکیده [English]
: In this paper, a nonlinear model of clamped-clamped microbeam actuated by electrostatic load with stretching and thermoelastic effects is presented. Free vibration frequency is calculated by discretization based on DQ method. Frequency is a complex value due to the thermoelastic effect that dissipates the energy. By separating the real and imaginary parts of frequency, quality factor of thermoelastic damping is calculated. Both stretching and thermoelastic effects are validated against the results of the reference papers. The variations of thermoelastic damping versus elasticity modulus, coefficient of thermal expansion and geometrical parameters such as thickness, gap distance, and length are investigated and these results are compared in the linear and nonlinear models for high values of voltage. Also, this paper shows that since for high values of electrostatic voltage the linear model reveals a large error for calculating the thermoelastic damping, the nonlinear model should be used for this purpose.
کلیدواژه‌ها [English]
- Microbeam vibration
- nonlinear vibration
- thermoelastic damping
- differential quadrature method
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